SAW Resonators Using Epitaxially Grown Al Electrodes
- 1 January 1991
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 30 (S1)
- https://doi.org/10.7567/jjaps.30s1.176
Abstract
Epitaxially grown Al electrode was obtained on rotated Y cut quartz substrate by vapor deposition. The epitaxial relationship was (311)Al//(032)SiO2. This electrode had very high resistance to stress migration. In SAW resonators, time to failure caused by stress migration was improved by more than 2000 times and power handling capability was increased by at least 10 times over an ordinary polycrystalline Al–Cu electrode. Epitaxially grown Al electrode was also obtained on LST-cut quartz substrate.Keywords
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