Conductive transparent films deposited by simultaneous sputtering of zinc-oxide and indium-oxide targets
- 1 November 2000
- Vol. 59 (2-3) , 546-552
- https://doi.org/10.1016/s0042-207x(00)00314-6
Abstract
No abstract availableThis publication has 4 references indexed in Scilit:
- Phase Relationships and Physical Properties of Homologous Compounds in the Zinc Oxide‐Indium Oxide SystemJournal of the American Ceramic Society, 1998
- Highly transparent and conductive ZnOIn2O3 thin films prepared by d.c. magnetron sputteringThin Solid Films, 1996
- Preparation of transparent and conductive In2O3–ZnO films by radio frequency magnetron sputteringJournal of Vacuum Science & Technology A, 1996
- Highly Transparent and Conductive Zn2In2O5 Thin Films Prepared by RF Magnetron SputteringJapanese Journal of Applied Physics, 1995