Chemical sensors with catalytic metal gates
- 1 May 1996
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 14 (3) , 1539-1545
- https://doi.org/10.1116/1.580292
Abstract
We first review the principles of gas sensitive field effect devices with catalytic metal gates. A discussion about recent experiments under ultrahigh vacuum conditions is given. More particularly, we consider the properties of the interface between the catalytic metal and the insulator it is evaporated on. A few more of the applied research areas related to these devices are also discussed and some remaining research problems are suggested.Keywords
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