Sol—gel processed TiO2-based thin films as innovative humidity sensors
- 1 April 1995
- journal article
- Published by Elsevier in Sensors and Actuators B: Chemical
- Vol. 25 (1-3) , 705-709
- https://doi.org/10.1016/0925-4005(95)85156-9
Abstract
No abstract availableKeywords
This publication has 15 references indexed in Scilit:
- Effect of alkaline oxide addition on the humidity sensitivitiy of Nb2O5-doped TiO2Published by Elsevier ,2001
- Humidity sensitivity of sputtered TiO2 thin filmsSensors and Actuators B: Chemical, 1994
- Humidity- and gas-sensing properties with an Fe2O3 film sputtered on a porous Al2O3 filmSensors and Actuators B: Chemical, 1993
- Development of chemical sensors using microfabrication and micromachining techniquesSensors and Actuators B: Chemical, 1993
- Microstructure and Electrical Properties of MgAl2O4 Thin Films for Humidity SensingJournal of the American Ceramic Society, 1993
- Humidity-Sensitive Properties of Titania Films Prepared Using the Sol-Gel ProcessJournal of the Ceramic Society of Japan, 1993
- Effects of alkaline oxide additives on the microstructure and humidity sensitivity of MgCr2O4TiO2Sensors and Actuators B: Chemical, 1992
- Humidity SensorsJournal of the American Ceramic Society, 1991
- Electrical Properties of TiO2‐K2Ti6O13 Porous Ceramic Humidity SensorJournal of the American Ceramic Society, 1990
- Humidity sensor using zirconium phosphates and silicates. Improvements of humidity sensitivitySensors and Actuators, 1988