Optical emission and laser-induced fluorescence diagnostics in reactive plasmas

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Abstract
An overview of optical diagnostic techniques for low pressure cold plasmas, such as those used in the electronics industry, is presented. Two different aspects of optical emission are considered. In the first, commonly called actinometry, species concentrations are inferred from line intensities, while in the second, translational energies are inferred from linewidths and shifts. In addition, consideration of the advantages of laser‐induced fluorescence techniques is given.

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