Planning and Scheduling for Epitaxial Wafer Production Facilities

• 1 February 1988
• journal article
• Published by Institute for Operations Research and the Management Sciences (INFORMS) in Operations Research
• Vol. 36  (1) , 34-49
• https://doi.org/10.1287/opre.36.1.34

Abstract

Keywords

• MODELS
• SCHEDULING
• SPECIALTY
• WAFERS
• PLANNING
• OPTIMAL
• HOMOGENEOUS
• REACTOR
• SHOP
• HEURISTIC