Implantation of Al and B Acceptors into Alpha-SiC and pn Junction Diodes

• 1 February 1998
• journal article
• Published by Trans Tech Publications, Ltd. in Materials Science Forum
• Vol. 264-268, 701-704
• https://doi.org/10.4028/www.scientific.net/msf.264-268.701

Abstract

Keywords

• ACCEPTOR
• ELECTRICAL ACTIVATION
• ION IMPLANTATION
• PN JUNCTION DIODE