An X-Ray Micro-Fluorescence Analysis System With Diffraction Capabilities

Abstract
A prototype X-ray fluorescence system for chemical and phase microanalysis of materials has been developed and tested. Preliminary work with this system has indicated X-ray fluorescence detection limits on the order of 40 picograms for heavier elements such as gold when using a 100 micron collimator, 400 second counting time and a silver anode operating at 12 Kw. Phase identification by X- ray diffraction can be obtained from the same spot. A proposed design for an improved system providing greater elemental sensitivities and capable of semi-automated operation has been completed.

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