Patterning of poly-para-xylylenes by reactive ion etching

• 1 April 1983
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology A
• Vol. 1  (2) , 604-608
• https://doi.org/10.1116/1.571967

Abstract

Keywords

• STRUCTURES
• REACTIVE ION
• ION ETCHING
• POLY PARA XYLYLENES