Effet des conditions expérimentales sur la CVD réactive de couches minces de TiC sur carbone
- 1 August 1989
- journal article
- Published by Elsevier in Journal of Crystal Growth
- Vol. 96 (4) , 871-880
- https://doi.org/10.1016/0022-0248(89)90647-7
Abstract
No abstract availableKeywords
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