FIB endpoint detection and depth resolution
- 1 April 1993
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 21 (1-4) , 201-204
- https://doi.org/10.1016/0167-9317(93)90055-a
Abstract
No abstract availableThis publication has 3 references indexed in Scilit:
- Mechanism of ion impact photoemission change of Si and Al during focused ion beam milling of LSIJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1991
- Focused ion beam induced optical emission spectroscopyJournal of Vacuum Science & Technology B, 1988
- Determination of depth resolution from measured sputtering profiles of multilayer structures: Equations and approximationsSurface and Interface Analysis, 1986