Ion-assisted laser deposition of CaF2 thin films at low temperatures
- 1 September 1989
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 7 (5) , 2983-2987
- https://doi.org/10.1116/1.576303
Abstract
Thin CaF2 films have been grown at low temperatures (20 °C) using an ion-beam-assisted laser evaporation method. Smooth, dense, environmentally stable coatings with bulk refractive indices were produced. This technique was applied to deposit mid-wave IR dichroic filters using CaF2 and Ge layers onto cold substrates.Keywords
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