Technology and Application of Grating Interferometers in High-precision Measurement

Publisher Website

1 January 1991

book chapter
Published by Springer Nature

p. 15-30
https://doi.org/10.1007/978-3-642-84494-2_2

Abstract

No abstract available

Keywords

This publication has 2 references indexed in Scilit:

Sub-micron position measurement and control on precision machine tools with laser interferometry
Precision Engineering, 1990
High-accuracy displacement interferometry refin air
Applied Optics, 1985