Cathodoluminescence Imaging And Spectroscopy Of CVD Diamond In A Scanning Electron Microscope
- 15 January 1990
- proceedings article
- Published by SPIE-Intl Soc Optical Eng
- Vol. 1146, 166-179
- https://doi.org/10.1117/12.962074
Abstract
Optically active defects in diamond films grown by the hot-filament chemical vapor deposition method were investigated by cathodoluminescence (CL) imaging and spectroscopy in a scanning electron microscope. A set of films grown on silicon substrates at deposition temperatures (Td) from 600°C to 850° C was studied. The spatial resolution of the CL images was approximately 0.2 to 0.5 μm; CL spectra were measured with wavelength resolution 0.4 nm in the wavelength range 350 to 900 nm.© (1990) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.Keywords
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