Vapor-Phase Polishing of Silicon with H₂-HBr Gas Mixtures

• 1 July 1965
• journal article
• Published by IBM in IBM Journal of Research and Development
• Vol. 9  (4) , 327-329
• https://doi.org/10.1147/rd.94.0327

Abstract

Keywords

• SILICON
• VAPOR PHASE
• GAS MIXTURES
• HBR GAS
• PHASE POLISHING
• H2 HBR