A Method for Measuring the Thickness of Epitaxial Silicon Films
- 1 July 1962
- journal article
- research article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 33 (7) , 2395-2396
- https://doi.org/10.1063/1.1728973
Abstract
No abstract availableThis publication has 1 reference indexed in Scilit:
- Stacking Faults in Epitaxial SiliconJournal of Applied Physics, 1962