Fabrication of suspended piezoelectric microresonators
- 1 August 1999
- journal article
- Published by Taylor & Francis in Integrated Ferroelectrics
- Vol. 24 (1-4) , 147-154
- https://doi.org/10.1080/10584589908215587
Abstract
No abstract availableThis publication has 1 reference indexed in Scilit:
- Fabrication of thick Si resonators with a frontside-release etch-diffusion processJournal of Microelectromechanical Systems, 1998