Deep x-ray lithography for micromechanics and precision engineering (invited)

• 1 September 1996
• journal article
• Published by AIP Publishing in Review of Scientific Instruments
• Vol. 67  (9) , 3357
• https://doi.org/10.1063/1.1147379

Abstract

Keywords

• LITHOGRAPHY
• MACHINING
• FABRICATION
• ACTUATORS
• PMMA
• X−RAY SOURCES
• SYNCHROTRON RADIATION SOURCES
• MANUFACTURING
• ENGINEERING
• USES
• MICROELECTRONICS