Effects of reactive ion etching on optical and electro-optical properties of GaInAs/InP based strip-loaded waveguides
- 1 July 1993
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- Vol. 11 (4) , 1214-1221
- https://doi.org/10.1116/1.586923
Abstract
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