Elimination of extra spring effect at the step-up anchor of surface-micromachined structure
- 1 March 1998
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in Journal of Microelectromechanical Systems
- Vol. 7 (1) , 114-121
- https://doi.org/10.1109/84.661393
Abstract
No abstract availableThis publication has 11 references indexed in Scilit:
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