The Chemical Vapour Deposition of Tantalum
- 1 January 1974
- journal article
- research article
- Published by Wiley in Crystal Research and Technology
- Vol. 9 (9) , 1003-1011
- https://doi.org/10.1002/crat.19740090905
Abstract
No abstract availableKeywords
This publication has 7 references indexed in Scilit:
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- SOLID-VAPOR EQUILIBRIA FOR THE COMPOUNDS Cd3As2 AND CdAs2The Journal of Physical Chemistry, 1960
- Preparation and X-ray Study of Some Tantalum HalidesJournal of the American Chemical Society, 1958
- Reaction of Tantalum, Columbium and Vanadium with IodineJournal of the American Chemical Society, 1939