Precursor and direct activated chemisorption of chlorine molecules onto silicon Si (111) (7.times.7) and Si (100) (2.times.1) surfaces
- 1 November 1993
- journal article
- research article
- Published by American Chemical Society (ACS) in The Journal of Physical Chemistry
- Vol. 97 (46) , 12051-12060
- https://doi.org/10.1021/j100148a035
Abstract
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