Property Evaluation of Vapor-Deposited TiN Film by the Analysis of Elastic Waves. (1st Report, Nondestructive Evaluation of Elastic Properties by Laser Surface Acoustic Waves.)
- 1 January 1998
- journal article
- Published by Japan Society of Mechanical Engineers in JSME International Journal Series A
- Vol. 41 (3) , 439-445
- https://doi.org/10.1299/jsmea.41.439
Abstract
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