High quality planar silicon nitride microdisk resonators for integrated photonics in the visible wavelength range
- 3 August 2009
- journal article
- Published by Optica Publishing Group in Optics Express
- Vol. 17 (17) , 14543-14551
- https://doi.org/10.1364/oe.17.014543
Abstract
High quality factor (Q≈3.4×106) microdisk resonators are demonstrated in a Si3N4 on SiO2 platform at 652–660 nm with integrated in-plane coupling waveguides. Critical coupling to several radial modes is demonstrated using a rib-like structure with a thin Si3N4 layer at the air-substrate interface to improve the coupling.Keywords
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