Oxidation resistance of hard wear resistant Ti0,5Al0,5N coatings grown by magnetron sputter deposition
- 1 December 1990
- journal article
- research article
- Published by Wiley in Materials and Corrosion
- Vol. 41 (12) , 753-754
- https://doi.org/10.1002/maco.19900411220
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Oxidation of metastable single-phase polycrystalline Ti0.5Al0.5N films: Kinetics and mechanismsJournal of Applied Physics, 1990
- Microstructure and physical properties of polycrystalline metastable Ti0.5Al0.5N alloys grown by d.c. magnetron sputter depositionThin Solid Films, 1987
- Industrial deposition of binary, ternary, and quaternary nitrides of titanium, zirconium, and aluminumJournal of Vacuum Science & Technology A, 1987
- Titanium aluminum nitride films: A new alternative to TiN coatingsJournal of Vacuum Science & Technology A, 1986