A miniature silicon accelerometer with built-in damping

Publisher Website

6 January 2003

proceedings article
Published by Institute of Electrical and Electronics Engineers (IEEE)

https://doi.org/10.1109/solsen.1988.26452

Abstract

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Keywords

This publication has 1 reference indexed in Scilit:

A batch-fabricated silicon accelerometer
IEEE Transactions on Electron Devices, 1979