Mechanical properties of thin films: Measurements of ultramicroindentation hardness, Young's modulus and internal stress
- 1 November 1987
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 154 (1-2) , 171-181
- https://doi.org/10.1016/0040-6090(87)90362-2
Abstract
No abstract availableThis publication has 5 references indexed in Scilit:
- Ultramicroindentation apparatus for the mechanical characterization of thin filmsJournal of Applied Physics, 1984
- An ultra-low-load penetration hardness testerJournal of Physics E: Scientific Instruments, 1982
- Mechanical properties of and cracks and wrinkles in vacuum-deposited MgF2, carbon and baron coatingsThin Solid Films, 1981
- Ultra-microhardness of vacuum-deposited films I: Ultra-microhardness testerThin Solid Films, 1978
- Solid-state electron-induced polymerization of ω-tricosenoic acid multilayersJournal of Colloid and Interface Science, 1977