An Apparatus for Magnetron Sputter Coating and Plasma Immersion Ion Implantation
- 1 January 1995
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 13 references indexed in Scilit:
- High current ion implantation by plasma immersion techniqueNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1995
- Stitching TiN films on high speed steel substrates by ion beamsMaterials Science and Engineering: A, 1991
- Plasma immersion ion implantation of steelsMaterials Science and Engineering: A, 1991
- Sub-100 mn p+/n junction formation using plasma immersion ion implantationNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1991
- Ion beam assisted coating and surface modification with plasma source ion implantationJournal of Vacuum Science & Technology A, 1990
- Interface tailoring for adhesion using ion beamsNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1989
- Plasma immersion ion implantation using plasmas generated by radio frequency techniquesApplied Physics Letters, 1988
- Sheath thickness and potential profiles of ion-matrix sheaths for cylindrical and spherical electrodesJournal of Applied Physics, 1987
- Algorithms for the rapid simulation of Rutherford backscattering spectraNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1985
- Modifications to the microhardness, adhesion, and resistivity of sputtered TiN films by ion implantationJournal of Vacuum Science & Technology A, 1983