Emerging technologies for ferroelectric films and coatings
- 1 September 1997
- journal article
- plenary
- Published by Taylor & Francis in Integrated Ferroelectrics
- Vol. 17 (1-4) , 1-10
- https://doi.org/10.1080/10584589708012976
Abstract
Chemical solution deposition (CSD) allows the integration of ferroelectric and piezoelectric coatings with both silicon technology and in large scale macroscopic devices. Applications of coatings as actuators, in high frequency ultrasonic transducers and for piezoelectric transformers are discussed.Keywords
This publication has 5 references indexed in Scilit:
- Characterization of thick lead zirconate titanate films fabricated using a new sol gel based processJournal of Applied Physics, 1997
- Thick ceramic coatings using a sol gel based ceramic-ceramic 0–3 compositeSurface and Coatings Technology, 1995
- Dielectric properties of ferroelectric thin films in the frequency range of mHz-GHzIntegrated Ferroelectrics, 1995
- Analysis of a three-layered piezoelectric ceramic transformer filterIEEE Transactions on Circuits and Systems I: Regular Papers, 1995
- Principles and applications of ultrasound backscatter microscopyIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 1993