Structure property relationships of carbonaceous films grown under ion enhancement

• 1 November 1986
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology A
• Vol. 4  (6) , 2892-2899
• https://doi.org/10.1116/1.573654

Abstract

Keywords

• ELECTRIC CONDUCTIVITY
• TITANIUM
• THIN FILM
• MAGNETRON SPUTTERING
• CHROMIUM
• ION BEAM
• PHYSICAL PROPERTIES
• CRYSTAL STRUCTURE
• COMPOSITE MATERIAL
• THERMAL STABILITY