Hydrogen Detector Utilizing Metal-Semiconductor Contacts
- 1 October 1981
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 20 (10) , L753-756
- https://doi.org/10.1143/jjap.20.l753
Abstract
A hydrogen detector was developed in which the hydrogen-sensitive palladium/oxide/semiconductor (Pd MOS) Schottky diode and the reference diode were connected in series with each other. The latter diode was made by deposition of a thin gold film on the other Pd MOS structure. The effects by temperature variation and ageing were so compensated that several thousand ppm H2 can be stably detected in the atmosphere ambient. A method of hydrogen detection was proposed where the photovoltaic output of the diode was monitored.Keywords
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