Growth of SiC by ?Hot-Wall? CVD and HTCVD

• 1 July 1997
• journal article
• research article
• Published by Wiley in Physica Status Solidi (b)
• Vol. 202  (1) , 321-334
• https://doi.org/10.1002/1521-3951(199707)202:1<321::aid-pssb321>3.0.co;2-h

Abstract

Keywords

• NATURAL SCIENCES
• ROOM TEMPERATURE
• POWER EFFICIENCY
• CYCLOTRON RESONANCE