Analysis of Radiation-Enhanced Diffusion of Aluminum in Silicon
- 1 January 1970
- journal article
- research article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 41 (1) , 434-436
- https://doi.org/10.1063/1.1658370
Abstract
No abstract availableThis publication has 8 references indexed in Scilit:
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- Non-metallic solids. Vacancy enhanced diffusion in silicon. Effects of irradiation and of chemical impuritiesDiscussions of the Faraday Society, 1961
- Diffusion of Donor and Acceptor Elements in SiliconJournal of Applied Physics, 1956