The EXTRION 220 parallel scan magnet
- 1 April 1991
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 55 (1-4) , 453-456
- https://doi.org/10.1016/0168-583x(91)96211-3
Abstract
No abstract availableThis publication has 3 references indexed in Scilit:
- The ASM-220 medium current implanterNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1989
- Beam scanning-electrostaticRadiation Effects, 1979
- Effect of Extended Fringing Fields on Ion-Focusing Properties of Deflecting MagnetsReview of Scientific Instruments, 1964