Quantification of atom-probe FIM data and an application to the investigation of surface segregation of alloys

Abstract
It is shown that the atom‐probe field‐ion‐microscope data does not give directly the true composition of a sample. A method is devised for converting the data to the true composition. We also report here the first ToF atom‐probe study of surface segregation of Pt–5% Ru and Pt–8% W alloys. Using the new analysis the true composition depth profiles of the alloys are obtained with a single atomic layer resolution.