Redeposition: a factor in ion-beam etching topography
- 1 June 1977
- journal article
- Published by Springer Nature in Journal of Materials Science
- Vol. 12 (6) , 1125-1133
- https://doi.org/10.1007/bf02426849
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Prediction of ion-bombarded surface topographies using Frank's kinematic theory of crystal dissolutionJournal of Materials Science, 1973
- The Use of Surface-Elastic-Wave Reflection Gratings in Large Time-Bandwidth Pulse-Compression FiltersIEEE Transactions on Microwave Theory and Techniques, 1973
- Secondary processes in the evolution of sputter-topographiesJournal of Materials Science, 1972