Coplanar waveguides on dielectric membranes micromachinedon a GaAs substrate
- 25 April 1996
- journal article
- Published by Institution of Engineering and Technology (IET) in Electronics Letters
- Vol. 32 (9) , 821-822
- https://doi.org/10.1049/el:19960564
Abstract
GaAs micromachining technology was used for fabricating coplanar transmission lines on Si3N4 and polyimide membranes deposited on GaAs substrates. On-wafer measurements of scattering parameters up to 75 GHz for several line configurations show a constant phase velocity of 2.9 108 m/s and a predominance of metallic losses with a square root frequency dependence.Keywords
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