Ellipsometric scatterometry for the metrology of sub-01-μm-linewidth structures
- 1 August 1998
- journal article
- Published by Optica Publishing Group in Applied Optics
- Vol. 37 (22) , 5112-5115
- https://doi.org/10.1364/ao.37.005112
Abstract
Optics InfoBase is the Optical Society's online library for flagship journals, partnered and copublished journals, and recent proceedings from OSA conferences.Keywords
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