Superconducting tunnel-junction x-ray detectors with niobium absorbers and aluminum quasi-particle traps

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Abstract
We are developing superconducting tunnel junction devices for use as high-resolution, high- efficiency x-ray spectrometers. We have tested devices with niobium x-ray absorbing layers coupled to aluminum layers which serve as quasiparticle traps. These devices were fabricated photolithographically using a modified niobium/aluminum/niobium trilayer fabrication process. Our first devices have a very thin barrier with specific normal state resistance of 1.5 X 10-6 (Omega) cm2, and also exhibit very low leakage current of 15 nA below 200 mK. The energy resolution at 6 keV is 190 eV FWHM, and is limited both by electronic noise and by the non-linear response of the detector.

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