Optical Measurements of Surface Films. I
- 1 December 1948
- journal article
- research article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 19 (12) , 839-841
- https://doi.org/10.1063/1.1741182
Abstract
Practical information is given concerning the calibration of an instrument called the ellipsometer, which is used to measure thicknesses from one angstrom unit up to many thousands angstrom units of transparent films deposited on polished metal slides. The instrument is a half‐shadow instrument taking advantage of the ellipticity of polarized light reflected from film‐coated metallic surfaces. The half‐shadow is produced by depositing a different thickness of transparent material on the lower and upper part of the slides, or by evaporating directly on the lower part of chromium slides a thin layer of gold.Keywords
This publication has 1 reference indexed in Scilit:
- The Ellipsometer, an Apparatus to Measure Thicknesses of Thin Surface FilmsReview of Scientific Instruments, 1945