Electrostatic actuation as a self-testing method for silicon pressure sensors
- 31 May 1997
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 60 (1-3) , 32-36
- https://doi.org/10.1016/s0924-4247(96)01417-3
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Electrostatic forces and their effects on capacitive mechanical sensorsSensors and Actuators A: Physical, 1996
- Accelerometer systems with self-testable featuresSensors and Actuators, 1989