Advanced CMOS transistors with a novel HfSiON gate dielectric

• 25 June 2003
• proceedings article
• Published by Institute of Electrical and Electronics Engineers (IEEE)
• p. 148-149
• https://doi.org/10.1109/vlsit.2002.1015428

Abstract

Keywords

• GATE DIELECTRIC
• CMOS TRANSISTORS
• ADVANCED CMOS
• HFSION GATE
• NOVEL HFSION