Structural and electrical studies of radio frequency sputtered hydrogenated amorphous silicon carbide films
- 15 December 1995
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 78 (12) , 7289-7294
- https://doi.org/10.1063/1.360377
Abstract
No abstract availableThis publication has 18 references indexed in Scilit:
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