Fracture testing of bulk silicon microcantilever beams subjected to a side load
- 1 January 1996
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in Journal of Microelectromechanical Systems
- Vol. 5 (3) , 142-150
- https://doi.org/10.1109/84.536620
Abstract
No abstract availableThis publication has 6 references indexed in Scilit:
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