Elimination of planar faults in lattice-matched heteroepitaxial films using ion-assisted molecular-beam epitaxy
- 1 January 1993
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- Vol. 11 (1) , 1-5
- https://doi.org/10.1116/1.586719
Abstract
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