Properties of rare earth oxide films

• 3 September 1979
• journal article
• Published by Elsevier in Thin Solid Films
• Vol. 62  (1) , 1-4
• https://doi.org/10.1016/0040-6090(79)90374-2

Abstract

Keywords

• OXIDE FILMS
• PROPERTIES
• RARE EARTH OXIDE
• SURFACE CHARGE
• DIELECTRIC PERMITTIVITY
• SILICON
• CHARGE DENSITY