Silicon mirrors and micromirror arrays for spatial laser beam modulation
- 22 November 2002
- proceedings article
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- Vol. 1, 81-84
- https://doi.org/10.1109/sensor.1997.613587
Abstract
No abstract availableKeywords
This publication has 7 references indexed in Scilit:
- High-voltage Devices And Circuits Fabricated Using Foundry Cmos For Use With Electrostatic Mem ActuatorsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2005
- Silicon mirror arrays fabricated by using bulk and surface micromachiningPublished by SPIE-Intl Soc Optical Eng ,1997
- Projection displays and MEMS: timely convergence for a bright futurePublished by SPIE-Intl Soc Optical Eng ,1995
- Integration Of Surface Micromachined Polysilicon Mirrors And A Standard Cmos ProcessPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1995
- Micromachined 50-um x 250-um silicon torsional mirror arrays for optical signal processingPublished by SPIE-Intl Soc Optical Eng ,1993
- Squeeze-film damping in solid-state accelerometersPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1990
- On Isothermal Squeeze FilmsJournal of Lubrication Technology, 1983