High temperature cracking of tungsten polycide films on quartz substrate
- 17 July 2000
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 370 (1) , 307-310
- https://doi.org/10.1016/s0040-6090(00)00936-6
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Redistribution of excess Si in chemical vapor deposited WSix films upon post-deposition annealingJournal of Applied Physics, 1986
- The strength of two-phase ceramic/glass materialsJournal of Materials Science, 1968