Spiral and solenoidal inductor structures on silicon using Cu-damascene interconnects

Publisher Website

27 November 2002

conference paper
Published by Institute of Electrical and Electronics Engineers (IEEE)

https://doi.org/10.1109/iitc.1998.704740

Abstract

No abstract available

Keywords

This publication has 2 references indexed in Scilit:

Multilevel-spiral inductors using VLSI interconnect technology
IEEE Electron Device Letters, 1996
A new toroidal-meander type integrated inductor with a multilevel meander magnetic core
IEEE Transactions on Magnetics, 1994