Formation of a Stacking Fault-Free Region in Thermally Oxidized Silicon

• 1 May 1978
• journal article
• Published by IOP Publishing in Japanese Journal of Applied Physics
• Vol. 17  (5) , 767-771
• https://doi.org/10.1143/jjap.17.767

Abstract

Keywords

• FREE REGION
• THERMALLY OXIDIZED
• FAULT FREE
• OXIDIZED SILICON
• STACKING FAULT
• FORMATION
• REGION IN THERMALLY